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Utilizing PLAD (Plasma Doping) for Next Generation Super-Junction Power Devices
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conference contribution
posted on 2024-08-22, 02:01 authored by Jianxin ZhengJianxin Zheng, Xiang NingThis paper introduces a new super junction design enabled by Plasma doping (PLAD) technique.
History
Journal/Conference/Book title
24th International Conference on Ion Implantation Technology 2024Publication date
2024-09Version
- Pre-print